TY  - JOUR
AU  - Martil De La Plaza, Ignacio
AU  - González Díaz, Germán
AU  - Martínez, F.L.
AU  - Selle, B.
AU  - Sieber, I.
PY  - 1998
DO  - 10.1016/S0022-3093(98)00092-1
SN  - 0022-3093
UR  - https://hdl.handle.net/20.500.14352/59293
T2  - Journal of Non-Crystalline Solids
AB  - We have analyzed the effects of rapid thermal annealing on the composition and on the bonding and optical properties of amorphous hydrogenated silicon nitride (a-Si-x:H) thin films deposited at room temperature by the electron cyclotron resonance...
LA  - eng
M2  - 523
PB  - Elsevier Science BV
KW  - Chemical-Vapor-Deposition
KW  - Silicon-Nitride
KW  - Thin-Films
KW  - Defects
KW  - Alloys
KW  - Model.
TI  - Influence of rapid thermal annealing processes on the properties of SiNx : H films deposited by the electron cyclotron resonance method
TY  - journal article
VL  - 227
ER  -