TY - CHAP AU - Lorenz, K. AU - Nogales Díaz, Emilio AU - Nédélec, R. AU - Penner, J. AU - Vianden, R. AU - Alves, E. AU - Martin, R.W. AU - O`Donnell, K.P. PY - 2006 DO - 10.1557/proc-0892-ff23-15 SN - 1-55899-846-2 UR - https://hdl.handle.net/20.500.14352/53571 AB - GaN films were implanted with Er and Eu ions and rapid thermal annealing was performed at 1000, 1100 and 1200 ⁰C in vacuum, in flowing nitrogen gas or a mixture of NH₃ and N₂. Rutherford backscattering spectrometry in the channeling mode was used to... LA - eng PB - Materials Research Soc KW - Devices TI - Influence of the annealing ambient on structural and optical properties of rare earth implanted GaN TY - book part ER -