RT Journal Article T1 Study of growth hillocks in GaN : Si films by electron beam induced current imaging A1 Zaldivar, M.H. A1 Fernández Sánchez, Paloma A1 Piqueras De Noriega, Francisco Javier AB Remote electron beam induced current (REBIC) measurements have been carried out to investigate electrically active regions in Si doped GaN films. REBIC bright-dark contrast has been observed in the border of growth, round or pyramidal, hillocks, while pyramidal hillocks also show bright contrast at the center. The results are explained by the inhomogeneous distribution of charged point defects and impurities at the hillocks. PB American Institute of Physics SN 0021-8979 YR 2001 FD 2001-07-15 LK https://hdl.handle.net/20.500.14352/59122 UL https://hdl.handle.net/20.500.14352/59122 LA eng NO © 2001 American Institute of Physics.This work was supported by MCYT-DGI (Project No. MAT2000-2119). M.H.Z. thanks AECI and CoNaCyT for a research grant. NO MCYT-DGI NO AECI NO CoNaCyT DS Docta Complutense RD 6 jul 2025