RT Journal Article
T1 Structure and void connectivity in nanocolumnar thin films grown by magnetron sputtering at oblique angles
A1 Álvarez, Rafael
A1 Regodón, Guillermo
A1 Acosta-Rivera, Hiedra
A1 Rico, Víctor
A1 Alcalá Penadés, Germán
A1 González-Elipe, Agustín R.
A1 Palmero, Alberto
AB The morphology and void connectivity of thin films grown by a magnetron sputtering deposition technique at oblique geometries were studied in this paper. A well-tested thin film growth model was employed to assess the features of these layers along with experimental data taken from the literature. A strong variation in the film morphology and pore topology was found as a function of the growth conditions, which have been linked to the different collisional transport of sputtered species in the plasma gas. Four different characteristic film morphologies were identified, such as (i) highly dense and compact, (ii) compact with large, tilted mesopores, (iii) nanocolumns separated by large mesopores, and (iv) vertically aligned sponge-like coalescent nanostructures. Attending to the topology and connectivity of the voids in the film, the nanocolumnar morphology was shown to present a high pore volume and area connected with the outside by means of mesopores, with a diameter above 2 nm, while the sponge-like nanostructure presented a high pore volume and area, as well as a dense network connectivity by means of micropores, with a diameter below 2 nm. The obtained results describe the different features of the porous network in these films and explain the different performances as gas or liquid sensors in electrochromic applications or for infiltration with nanoparticles or large molecules.
PB MDPI
YR 2023
FD 2023-05-26
LK https://hdl.handle.net/20.500.14352/104280
UL https://hdl.handle.net/20.500.14352/104280
LA eng
NO Alvarez, R., Regodon, G., Acosta-Rivera, H., Rico, V., Alcala, G., González-Elipe, A. R., & Palmero, A. (2023). Structure and Void Connectivity in Nanocolumnar Thin Films Grown by Magnetron Sputtering at Oblique Angles. Coatings, 13(6), 991.
NO (2023)  Structure and void connectivity in nanocolumnar thin films grown by magnetron sputtering at oblique angles. Descuentos MDPI
NO European Union NextGeneration EU/PRTR
NO MCIN/AEI/10.13039/501100011033
NO European Union (EU)
NO Spanish Government
NO Consejeria de Transformacion Economica, Industria, Conocimiento y Universidades de la Junta de Andalucia
NO H2020-EU.1.2.1-FET OPEN program
NO University of Seville (VI PPIT-US)
DS Docta Complutense
RD 20 abr 2025