TY - JOUR AU - García Hernansanz, Rodrigo AU - García Hemme, Eric AU - Montero Álvarez, Daniel AU - Prado Millán, Álvaro del AU - Olea Ariza, Javier AU - San Andrés Serrano, Enrique AU - Mártil de la Plaza, Ignacio AU - González Díaz, Germán PY - 2016 DO - 10.1109/JPHOTOV.2016.2581487 SN - 2156-3381 UR - https://hdl.handle.net/20.500.14352/24640 T2 - IEEE journal of photovoltaics AB - We have deposited intrinsic amorphous silicon (a-Si:H) using the electron cyclotron resonance (ECR) chemical vapor deposition technique in order to analyze the a-Si:H/c-Si heterointerface and assess the possible application in heterojunction with... LA - eng PB - Institute of Electrical and Electronics and Engineers (IEEE) KW - Silicon KW - Photovoltaic cells KW - Substrates KW - Absorption KW - Surface treatment KW - Plasmas KW - Temperature KW - Measurement minority lifetime KW - Electron cyclotron resonance chemical vapor deposition (ECR-CVD) KW - heterojunction KW - interface defects KW - metal insulator semiconductor (MIS) devices TI - Deposition of Intrinsic a-Si:H by ECR-CVD to Passivate the Crystalline Silicon Heterointerface in HIT Solar Cells TY - journal article VL - 6 ER -