RT Journal Article T1 Silicon-rich SiO_2/SiO_2 multilayers: A promising material for the third generation of solar cell A1 Gourbilleau, F. A1 Ternon, C. A1 Maestre Varea, David A1 Palais, O. A1 Dufour, C. AB Si-rich-SiO_2(SRSO)/SiO_2 multilayers (MLs) have been grown by reactive magnetron sputtering. The presence of silicon nanoclusters (Si-ncls) within the SRSO sublayer and annealing temperature influence optical absorption as well as photoluminescence. The optimized annealing temperature has been found to be 1100°C, which allows the recovery of defects and thus enhances photoluminescence. Four MLs with Si-ncl size ranging from 1.5 to 8 nm have been annealed using the optimized conditions and then studied by transmission measurements. Optical absorption has been modeled so that a size effect in the linear absorption coefficient α (in cm^(-1)) has been evidenced and correlated with TEM observations. It is demonstrated that amorphous Si-ncl absorption is fourfold higher than that of crystalline Si ncls. PB American Institute of Physics SN 0021-8979 YR 2009 FD 2009-07-01 LK https://hdl.handle.net/20.500.14352/42751 UL https://hdl.handle.net/20.500.14352/42751 LA eng NO © 2009 American Institute of PhysicsSome of the authors want to thank Pr Xavier Portier for performing some of the HREM observations. This work has been supported by the ANR Solaire Photovoltaique through the DUOSIL project. NO ANR Solaire Photovoltaique DS Docta Complutense RD 6 abr 2025