RT Journal Article
T1 Micromachined silicon lenses for terahertz applications
A1 Bueno, Juan
A1 López Camacho, Elena
A1 Silva López, Manuel
A1 Rico García, José María
A1 Llombart, N
A1 Alda Serrano, Javier
A1 Costa-Krämer, José Luis
AB Silicon microlenses are a very important tool for coupling terahertz (THz) radiation into antennas and detectors in integrated circuits. They can be used in a large array structures at this frequency range reducing considerably the crosstalk between the pixels. Drops of photoresist have been deposited and their shape transferred into the silicon by means of a Reactive Ion Etching (RIE) process. Large silicon lenses with a few mm diameter (between 1.5 and 4.5 mm) and hundreds of μm height (between 50 and 350 μm) have been fabricated. The surface of such lenses has been characterized using Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM), resulting in a surface roughness of about ∼3 μm, good enough for any THz application. The beam profile at the focal plane of such lenses has been measured at a wavelength of 10.6 μm using a tomographic knife-edge technique and a CO2 laser.
PB Elsevier
SN 1350-4495
YR 2013
FD 2013-11
LK https://hdl.handle.net/20.500.14352/35218
UL https://hdl.handle.net/20.500.14352/35218
LA eng
NO Bueno, J., López Camacho, E., Silva López, M. et al. «Micromachined Silicon Lenses for Terahertz Applications». Infrared Physics & Technology, vol. 61, noviembre de 2013, pp. 144-48. DOI.org (Crossref), https://doi.org/10.1016/j.infrared.2013.08.002.
NO Ministerio de Economía, Comercio y Empresa (España)
NO Programa "Ramon y Cajal"
DS Docta Complutense
RD 26 ago 2024