TY - JOUR AU - Bueno, Juan AU - López Camacho, Elena AU - Silva López, Manuel AU - Rico García, José María AU - Llombart, N AU - Alda Serrano, Javier AU - Costa-Krämer, José Luis DA - Received 4 May 2012, Available online 22 August 2013 PY - 2013 DO - 10.1016/j.infrared.2013.08.002 SN - 1350-4495 UR - https://hdl.handle.net/20.500.14352/35218 T2 - Infrared Physics & Technology AB - Silicon microlenses are a very important tool for coupling terahertz (THz) radiation into antennas and detectors in integrated circuits. They can be used in a large array structures at this frequency range reducing considerably the crosstalk between... LA - eng M2 - 144 PB - Elsevier KW - Microfabricated lenses KW - Silicon lenses KW - Beam pattern KW - Surface characterisation KW - THz spectroscopy TI - Micromachined silicon lenses for terahertz applications TY - journal article VL - 61 ER -