%0 Journal Article
%A Plugaru, R.
%A Méndez Martín, María Bianchi
%A Piqueras De Noriega, Francisco Javier
%A Tate, T.J.
%T Study of thermal treated a-Si implanted with Er and O ions
%D 2002
%@ 0953-8984
%U https://hdl.handle.net/20.500.14352/58919
%X Visible luminescence of amorphous silicon layers either implanted with Er or co-implanted with Er and O and subsequently annealed in nitrogen has been investigated by cathodoluminescence (CL) in a scanning electron microscope. Co-implanted samples show a more intense luminescence, which is revealed by annealing at lower temperatures than the samples implanted only with erbium. Thermal treatments cause the formation of erbium oxide as well as Er-Si complexes or precipitates. Violet-blue luminescence has been found from CL images and spectra to be related to Er-Si precipitates. Emission in the green-red range is attributed to oxide species.
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