TY - JOUR AU - Plugaru, R. AU - Méndez Martín, Bianchi AU - Piqueras de Noriega, Javier AU - Tate, T.J. PY - 2002 DO - 10.1088/0953-8984/14/48/363 SN - 0953-8984 UR - https://hdl.handle.net/20.500.14352/58919 T2 - Journal of Physics: Condensed Mater AB - Visible luminescence of amorphous silicon layers either implanted with Er or co-implanted with Er and O and subsequently annealed in nitrogen has been investigated by cathodoluminescence (CL) in a scanning electron microscope. Co-implanted samples... LA - eng M2 - 13153 PB - Institute of Physics KW - Erbium Luminescence KW - Amorphous-Silicon KW - Crystal Silicon KW - Porous Silicon KW - Excitation KW - Cathodoluminescence KW - Photoluminescence KW - Films KW - Segregation KW - Epitaxy TI - Study of thermal treated a-Si implanted with Er and O ions TY - journal article VL - 14 ER -