TY - JOUR AU - Díaz-Guerra Viejo, Carlos AU - Piqueras de Noriega, Javier PY - 2004 DO - 10.1051/ep.jap:2004091 SN - 1286-0042 UR - https://hdl.handle.net/20.500.14352/51145 T2 - European Physical Journal-Applied Physics AB - Cathodoluminescence (CL) microscopy and spectroscopy have been used to investigate the nature and spatial distribution of defects and impurities in n-type epitaxial 4H-SiC. CL microscopy reveals the existence of 6H-SiC polytype inclusions, while CL... M2 - 227 PB - E D P Sciences KW - Silicon-Carbide KW - Epitaxial-Growth KW - Schottky Diodes KW - Defects KW - Crystals KW - Centers TI - Cathodoluminescence microscopy and spectroscopy of n-type 4H-SiC epilayers TY - journal article VL - 27 ER -