RT Journal Article T1 Inversion charge study in TMO hole-selective contact based solar cells A1 García Hernansanz, Rodrigo A1 Pérez Zenteno, Francisco José A1 Duarte Cano, Sebastián A1 Caudevilla Gutiérrez, Daniel A1 Algaidy, Sari A1 García Hemme, Eric A1 Olea Ariza, Javier A1 Pastor Pastor, David A1 Prado Millán, Álvaro Del A1 San Andrés Serrano, Enrique A1 Martil De La Plaza, Ignacio A1 Ros, Eloy A1 Puigdollers, Joaquim A1 Ortega, Pablo A1 Voz, Cristobal AB In this article, we study the effect of the inversion charge ( Q _inv ) in a solar cell based on the hole-selective characteristic of substoichiometric molybdenum oxide (MoO_x ) and vanadium oxide (VO_x ) deposited directly on n-type silicon. We measure the capacitance–voltage ( C – V ) curves of the solar cells at different frequencies and explain the results taking into account the variation of the space charge and the existence of Q_inv in the c-Si inverted region. The high-frequency capacitance measurements follow the Schottky metal–semiconductor theory, pointing to a low inversion charge influence in these measurements. However, for frequencies lower than 20 kHz, an increase in the capacitance is observed, which we relate to the contribution of the inversion charge. In addition, applying the metal–semiconductor theory to the high-frequency measurements, we have obtained the built-in voltage potential and show new evidence about the nature of the conduction process in this structure. This article provides a better understanding of the transition metal oxide/n-type crystalline silicon heterocontact. PB IEEE SN 2156-3381 YR 2023 FD 2023 LK https://hdl.handle.net/20.500.14352/88806 UL https://hdl.handle.net/20.500.14352/88806 LA eng NO R. García-Hernansanz, F. Pérez-Zenteno, S. Duarte-Cano, D. Caudevilla, S. Algaidy, E. García-Hemme, J. Olea, D. Pastor, A. del Prado, E. S. Andrés, I. Mártil, E. Ros, J. Puigdollers, P. Ortega, and C. Voz, IEEE Journal of Photovoltaics 13, 656 (2023). NO Comunidad de Madrid NO European Commission NO Ministerio de Ciencia, Innovación y Universidades (España) DS Docta Complutense RD 11 abr 2025