TY  - JOUR
AU  - Martil De La Plaza, Ignacio
AU  - González Díaz, Germán
AU  - Prado Millán, Álvaro Del
PY  - 2000
DO  - 10.1002/1096-9918(200008)30:1<534::AID-SIA832>3.0.CO;2-C
SN  - 0142-2421
UR  - https://hdl.handle.net/20.500.14352/59231
T2  - Surface and interface analysis
AB  - The composition of amorphous SiNx:H films grown by the electron cyclotron resonance (ECR) plasma method was studied by heavy-ion elastic recoil detection analysis (ERDA) with Xe-129 ion beams of 1.1 and 1.8 MeV amu(-1) and time-of-light (ToF) mass...
M2  - 534
PB  - John Wiley & Sons Ltd
KW  - Electron-Cyclotron-Resonance
KW  - Silicon-Nitride
KW  - Temperature
KW  - Deposition.
TI  - Compositional analysis of amorphous SiNx : H films by ERDA and infrared spectroscopy
TY  - journal article
VL  - 30
ER  -