TY  - JOUR
AU  - Caudevilla Gutiérrez, Daniel
AU  - Pérez Zenteno, Francisco José
AU  - Duarte Cano, Sebastián
AU  - Algaidy, Sari
AU  - Benítez Fernández, Rafael
AU  - Godoy Pérez, Guillermo
AU  - Olea Ariza, Javier
AU  - San Andrés Serrano, Enrique
AU  - García Hernansanz, Rodrigo
AU  - Prado Millán, Álvaro Del
AU  - Martil De La Plaza, Ignacio
AU  - Pastor Pastor, David
AU  - García Hemme, Eric
PY  - 2024
DO  - 10.1002/pssa.202400124
UR  - https://hdl.handle.net/20.500.14352/110956
T2  - physica status solidi (a) – applications and materials science (PSSA)
AB  - Herein, the structural properties and chemical composition of Ge samples implanted with tellurium at cryogenic temperatures are analyzed, focusing on the role of the native oxide. For germanium, cryogenic-temperature implantation is a requirement to...
LA  - eng
M2  - 2400124-1
PB  - Wiley
TI  - Native Oxide Layer Role during Cryogenic-Temperature Ion Implantations in Germanium
TY  - journal article
ER  -