TY  - JOUR
AU  - Martil De La Plaza, Ignacio
PY  - 1999
DO  - 10.1016/S0040-6090(99)00166-2
SN  - 0040-6090
UR  - https://hdl.handle.net/20.500.14352/59264
T2  - Thin Solid Films
AB  - We developed and tested three MBE-compatible processes for the deposition of high-quality low-temperature silicon oxides and oxynitrides in the ultra high vacuum at substrate temperatures between room temperature and 500 degrees C, gas enhanced...
LA  - eng
M2  - 135
PB  - Elsevier Science SA
KW  - Chemical-Vapor-Deposition
KW  - Molecular-Beam Epitaxy
KW  - Films
KW  - Si
KW  - Hydrogen
KW  - Interface.
TI  - Fabrication and characterisation of thin low-temperature MBE-compatible silicon oxides of different stoichiometry
TY  - journal article
VL  - 349
ER  -