%0 Journal Article
%A Quiroga Mellado, Juan Antonio
%A Martínez Antón, Juan Carlos
%A González Moreno, Ricardo
%T Optical characterization of surfaces by robust reflectance determination based on air-gap interference
%D 2004
%@ 0169-4332
%U https://hdl.handle.net/20.500.14352/50816
%X In this work we present an optical tool for characterizing the reflectance and polarimetric properties of surfaces. It uses only the image of the interference fringe pattern produced in a thin air-gap between the surface of interest and a glass surface acting as a reference. From only the contrast of the fringe pattern captured with a CCD we may obtain the reflectance of the surface, no need of measuring a reference beam. By taking two images with polarized light, we may get then the polarized reflectance R_p and R_s, but also the ellipsometric magnitude Δ, simply as a phase shift between fringes in p and s polarization. A sample of silicon with a thin layer of thermally grown silica is used to test the method.
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