RT Journal Article
T1 Optical characterization of surfaces by robust reflectance determination based on air-gap interference
A1 Quiroga Mellado, Juan Antonio
A1 Martínez Antón, Juan Carlos
A1 González Moreno, Ricardo
AB In this work we present an optical tool for characterizing the reflectance and polarimetric properties of surfaces. It uses only the image of the interference fringe pattern produced in a thin air-gap between the surface of interest and a glass surface acting as a reference. From only the contrast of the fringe pattern captured with a CCD we may obtain the reflectance of the surface, no need of measuring a reference beam. By taking two images with polarized light, we may get then the polarized reflectance R_p and R_s, but also the ellipsometric magnitude Δ, simply as a phase shift between fringes in p and s polarization. A sample of silicon with a thin layer of thermally grown silica is used to test the method.
PB Elsevier Science B. V.
SN 0169-4332
YR 2004
FD 2004-11-15
LK https://hdl.handle.net/20.500.14352/50816
UL https://hdl.handle.net/20.500.14352/50816
LA eng
NO © 2004 Elsevier B.V.International Meeting on Applied Physics (APHYS) (1ª. 2003. Badajoz).This work has obtained partial financial support from the project DPI.2001-1238 (MCYT, Spain).
NO MCYT Ministerio de Ciencia y Tecnología, Spain
DS Docta Complutense
RD 26 ene 2026