RT Journal Article
T1 High quality factor indium oxide mechanical microresonators
A1 Bartolomé Vílchez, Javier
A1 Cremades Rodríguez, Ana Isabel
A1 Piqueras de Noriega, Javier
AB The mechanical resonance behavior of as-grown In_2O_3 microrods has been studied in this work by in-situ scanning electron microscopy (SEM) electrically induced mechanical oscillations. Indium oxide microrods grown by a vapor–solid method are naturally clamped to an aluminum oxide ceramic substrate, showing a high quality factor due to reduced energy losses during mechanical vibrations. Quality factors of more than (10)^5 and minimum detectable forces of the order of (10)^(16) N/Hz^(1/2) demonstrate their potential as mechanical microresonators for real applications. Measurements at low- vacuum using the SEM environmental operation mode were performed to study the effect of extrinsic damping on the resonators behavior. The damping coefficient has been determined as a function of pressure.
PB Amer Inst Physics
SN 0003-6951
YR 2015
FD 2015-11-09
LK https://hdl.handle.net/20.500.14352/24308
UL https://hdl.handle.net/20.500.14352/24308
LA eng
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NO ©2015 AIP Publishing LLC.This work has been supported by MINECO (Project Nos. MAT 2012-31959 and CSD 2009-00013). J.B. acknowledges the financial support from Universidad Complutense de Madrid.
NO Ministerio de Economía y Competitividad (MINECO)
NO Universidad Complutense de Madrid
DS Docta Complutense
RD 28 abr 2024