TY  - JOUR
AU  - San Andrés Serrano, Enrique
AU  - Feijoo, Pedro Carlos
AU  - Pampillón, María Ángela
AU  - Lucía Mulas, María Luisa
AU  - Prado Millán, Álvaro Del
PY  - 2014
DO  - 10.1149/06102.0027ecst
UR  - https://hdl.handle.net/20.500.14352/98993
T2  - ECS Transactions
AB  - Our research group studies the deposition of high permittivity dielectrics by a non-standard method: high-pressure sputtering. The dielectrics studied here are gadolinium scandate deposited from dielectric targets, and gadolinium oxide deposited from...
LA  - eng
M2  - 27
PB  - IOP Science
TI  - High pressure sputtering for kigh-k dielectric deposition. Is it worth trying?
TY  - journal article
VL  - 61
ER  -