TY - JOUR AU - Olea Ariza, Javier AU - González Díaz, Germán AU - Pastor Pastor, David AU - García Hemme, Eric AU - Caudevilla Gutiérrez, Daniel AU - Algaidy, Sari AU - Pérez Zenteno, Francisco José AU - Duarte Cano, Sebastián AU - García Hernansanz, Rodrigo AU - Prado Millán, Álvaro Del AU - San Andrés Serrano, Enrique AU - Martil De La Plaza, Ignacio PY - 2022 DO - 10.1088/1361-6641/aca9f0 SN - 0268-1242 UR - https://hdl.handle.net/20.500.14352/88773 T2 - Semiconductor Science and Technology AB - In the scope of supersaturated semiconductors for infrared detectors, we implanted Si samples with Ti at high doses and processed them by rapid thermal annealing (RTA) to recover the crystal quality. Also, for comparative purposes, some samples were... LA - eng PB - IOP Publishing KW - Detector KW - Hall KW - Hyperdoped KW - Infrared KW - Silicon KW - Supersaturated KW - Titanium TI - Electronic transport properties of Ti-supersaturated Si processed by rapid thermal annealing or pulsed-laser melting TY - journal article VL - 38 ER -