TY  - CHAP
AU  - Alonso Fernández, José
AU  - Crespo Vázquez, Daniel
AU  - Jiménez Castillo, Isidoro
AU  - Bernabéu Martínez, Eusebio
A4  - Badenes, Goncal
A4  - Abbott, Derek
A4  - Serpenguzel, Ali
PY  - 2005
DO  - 10.1117/12.628135
SN  - 0-8194-5835-X
UR  - https://hdl.handle.net/20.500.14352/53385
AB  - An all optical autofocus has been designed and tested for tight line width control in a high NA laser photoplotter system. The laser system is based in a GaN semiconductor laser with power 30 mW and wavelength 405 nm. The advantage of using this...
M2  - 871
PB  - SPIE--The International Society for Optical Engineering
KW  - System
TI  - Optical autofocus for high resolution laser photoplotting
TY  - book part
VL  - 1-2
ER  -