RT Journal Article
T1 Overcoming the solid solubility limit of Te in Ge by ion implantation and pulsed laser melting recrystallization
A1 Caudevilla Gutiérrez, Daniel
A1 Berencen, Y.
A1 Algaidy, Sari
A1 Zenteno Pérez, Francisco
A1 Olea Ariza, Javier
A1 San Andrés Serrano, Enrique
A1 García Hernansanz, Rodrigo
A1 Prado Millán, Álvaro Del
A1 Pastor Pastor, David
A1 García Hemme, Eric
AB Germanium hyperdoped with deep level donors,such as tellurium, would lead to dopant-mediated sub-band gap mid-infrared photoresponse at room temperature. We use acombination of non-equilibrium techniques to supersaturate Ge with Te via ion implantation followed by pulsed laser melting (PLM). Typically, liquid N2 (77K) temperatures are used to avoid implantation-induced Ge surface porosity. In this work, alternatively, we report on the use of slightly higher implantation temperatures (143 K) together with an amorphous Si (a-Si) capping layer. We demonstrate that the solid solubility limit of Te in Ge is overcome upon recovering the crystallinity of the material after laser processing.
PB IEEE
SN 2643-1300
YR 2021
FD 2021
LK https://hdl.handle.net/20.500.14352/8507
UL https://hdl.handle.net/20.500.14352/8507
LA eng
NO ©IEEE.Spanish Conference on Electron Devices (CDE) (13.2021. Sevilla)This work is part of the project TEC2017-84378-R, funded by MICINN and European Social Fund and project MADRID-PV2 (P2018/EMT-4308) funded by the Comunidad Autónoma de Madrid with the support from FEDER Funds. Parts of this research were carried out at IBC at the Helmholtz–Zentrum Dresden–Rossendorf e. V., a member of the Helmholtz Association. Authors would like to thank Ulrich Kentsch for his assistance with the lowtemperature implantations. D. Caudevilla would also acknowledge grant PRE2018-083798, financed by MICINN and European Social Fund. D. Pastor acknowledges financial support from the program Ramón y Cajal (Grant No. RYC2014-16936).
NO Ministerio de Ciencia e Innovación (MICINN)
NO Comunidad de Madrid/FEDER
NO Programa Ramón y Cajal
DS Docta Complutense
RD 13 may 2025