TY - JOUR AU - Caudevilla Gutiérrez, Daniel AU - Berencen, Y. AU - Algaidy, Sari AU - Zenteno Pérez, Francisco AU - Olea Ariza, Javier AU - San Andrés Serrano, Enrique AU - García Hernansanz, Rodrigo AU - Prado Millán, Álvaro Del AU - Pastor Pastor, David AU - García Hemme, Eric PY - 2021 DO - 10.1109/CDE52135.2021.9455720 SN - 2643-1300 UR - https://hdl.handle.net/20.500.14352/8507 T2 - 2021 13th Spanish Conference on Electron Devices (CDE) AB - Germanium hyperdoped with deep level donors,such as tellurium, would lead to dopant-mediated sub-band gap mid-infrared photoresponse at room temperature. We use acombination of non-equilibrium techniques to supersaturate Ge with Te via ion... LA - eng M2 - 1 PB - IEEE KW - Ion implantation KW - PLM KW - Germanium KW - Tellurium KW - Capping layer TI - Overcoming the solid solubility limit of Te in Ge by ion implantation and pulsed laser melting recrystallization TY - journal article ER -