TY - JOUR AU - Sánchez López, J.C. AU - Caro, A. AU - Rojas, T.C. AU - Alcalá Penadés, Germán PY - 2020 DO - 10.1016/j.surfcoat.2020.126235 UR - https://hdl.handle.net/20.500.14352/126464 T2 - Surface and Coatings Technology AB - This work presents a complete study of the influence of HiPIMS pulse characteristics on the microstructure, chemical composition, mechanical and oxidation resistance properties of CrN thin films. The investigated parameters were frequency and pulse... LA - eng PB - ELSEVIER SCIENCE SA KW - HiPIMS KW - Duty cycle KW - Pulse KW - Oxidation resistance KW - Hardness KW - Bias TI - Tailoring CrNx stoichiometry and functionality by means of reactive HiPIMS TY - journal article VL - 401 ER -