RT Journal Article T1 Structural and optical properties of Si-doped GaN A1 Cremades Rodríguez, Ana Isabel A1 Gorgens, L. A1 Ambacher, O. A1 Stutzmann, M. A1 Scholz, F. AB Structural and optical properties of Si-doped GaN thin films grown by metal-organic chemical vapor deposition have been studied by means of high resolution x-ray diffraction (XRD), atomic force microscopy, photoluminescence, photothermal deflection spectroscopy, and optical transmission measurements. The incorporation of silicon in the GaN films leads to pronounced tensile stress. The energy position of the neutral donor bound excitonic emission correlates with the measured stress. The stress induced near band gap luminescence shift is estimated to 19^+_-2 meV/GPa. An increasing concentration of dopant impurities in the films leads to asymmetries of the XRD and photoluminescence spectra, which are probably related to a Stress induced inhomogeneous distribution of dopants. Atomic force microscopy observations of surface modulation with increasing silicon doping support this latter statement. Transmission and photothermal deflection spectroscopy measurements are used to determine the band gap energy and Urbach energy of highly doped samples. PB American Physical Society SN 1098-0121 YR 2000 FD 2000-01-15 LK https://hdl.handle.net/20.500.14352/58823 UL https://hdl.handle.net/20.500.14352/58823 LA eng NO 1. P. Hacke, A. Maekawa, N. Koide, K. Hiramatsu, and N. Sawaki, Jpn. J. Appl. Phys., Part 1 33, 6443 (1994).2. W. Götz, N.M. Johnson, C. Chen, H. Liu, C. Kuo, and W. Imler, Appl. Phys. Lett. 68, 3144 (1996).3. L.B. Rowland, K. Doverspike, and D.K. Gaskill, Appl. Phys. Lett. 66, 1495 (1995).4. S. Ruvimov, Z. Liliental-Weber, T. Suski, J.W. Ager III, J. Wasburn, J. Krueger, C. Kiselowski, E.R. Weber, H. Amano, and I. Akasaki, Appl. Phys. Lett. 69, 990 (1996).5. M. Herrera Zaldı´var, P. Ferna´ndez, and J. Piqueras, J. Appl. Phys. 83, 462 (19989.6. E. Oh, H. Park, and Y. Park, Appl. Phys. Lett. 72, 1848 (1998).7. X. Zhang, S.-J. Chuas, W. Liu, and K.-B. Chong, Appl. Phys. Lett. 72, 1890 (1998).8. E.F. Schubert, I.D. Goepfert, W. Grieshaber, and J.M. Redwing, Appl. Phys. Lett. 71, 921 (1997).9. I.-H. Lee, I.-H. Choi, C.R. Lee, and S.K. Noh, Appl. Phys. Lett. 71, 1359 (1997).10. M. Leszczynski, T. Suski, H. Teisseyre, P. Perlin, I. Grzegory, J. Jun, S. Porowski, and T.D. Moustakas, J. Appl. Phys. 76, 4909 (1994).11. W. Rieger, T. Metzger, H. Angerer, R. Dimitrov, O. Ambacher, and M. Stutzmann, Appl. Phys. Lett. 68, 970 (1996).12. A.C. Boccara, D. Fournier, W.B. Jackson, and N.M. Amer, Opt. Lett. 5, 377 (1980).13. W.B. Jackson, N.M. Amer, A.C. Boccara, and D. Fournier, Appl. Opt. 20, 1333 (1981).14. O. Ambacher, D. Brunner, R. Dimitrov, M. Stutzmann, F. Scholz, and A. Sohmer, Jpn. J. Appl. Phys., Part 1 37, 745 (1998).15. T. Metzger, Dissertation, Technische Universita¨t Munchen, 1997.16. C. Kisielowski, J. Kru¨ger, S. Ruvimov, T. Suski, J.W. Ager III, E. Jones, Z. Lilienthal-Weber, M. Rubin, E.R. Weber, M.D. Bremser, and R.F. Davis, Phys. Rev. B 54, 17 745 (1996).17. K. Wang and R.R. Reeber, in Nitride Semiconductors, edited by E. Ma et al., MRS Symposia Proceedings No. 482 (Materials Research Society, Pittsburgh, 1997).18. M. Leszczynski, T. Suski, H. Teisseyre, P. Perlin, I. Grzegory, J. Jun, S. Porowski, and T. Moustakas, J. Appl. Phys. 76, 4909 (1994).19. V.Y. Davydov, N.S. Arerkiev, I.N. Goncharuk, D.K. Nelson, I.P. Nikitina, A.S. Polkovnikov, A.N. Smirnov, M.A. Jacobson, and O.K. Semchinova, J. Appl. Phys. 82, 5097 (1997).20. B.J. Skromme, H. Zhao, D. Wang, H.S. Kong, M.T. Leonard, G.E. Bulman, and R.J. Molnar, Appl. Phys. Lett. 71, 829 (1997).21. N. Wieser (private communication).22. E. Burstein, Phys. Rev. 93, 632 (1954).23. H. Hirayama, S. Tanaka, P. Ramvall, and Y. Aoyagi, Appl. Phys. Lett. 72, 1736 (1998).24. X.-Q. Shen, S. Tanaka, S. Iwai, and Y. Aoyagi, Appl. Phys. Lett. 72, 344 (1998). 25. S. Tanaka, S. Iwai, and Y. Aoyagi, Appl. Phys. Lett. 69, 4096 (1996).26. I.N. Stranski and V.L. Krastanow, Akad. Wiss. Lit. Mainz Abh. Math. Naturwiss. Kl. 146, 797 (1939). 27. W. Dorsch, B. Steiner, M. Albrecht, H.P. Strunk, H. Wawra, and G. Wagner, J. Cryst. Growth 183, 305 (1998).28. A.F. Wright, J. Appl. Phys. 82, 2835 (1997).29. W. Shan, J. Schmidt, R.J. Hauenstein, J.J. Song and B. Goldenberg, Appl. Phys. Lett. 66, 3492 (1995). NO ©2000 The American Physical Society.This work was supported by the Bayerische Forschungsstiftung (FOROPTO II). A.C. thanks the Spanish Ministerio de Educación y Cultura for a grant. NO Spanish Ministerio de Educación y Cultura NO Bayerische Forschungsstiftung (FOROPTO II) DS Docta Complutense RD 2 may 2024