TY  - JOUR
AU  - Mártil de la Plaza, Ignacio
AU  - González Díaz, Germán
AU  - Prado Millán, Álvaro del
AU  - San Andrés Serrano, Enrique
PY  - 2002
DO  - 10.1063/1.1495068
SN  - 0021-8979
UR  - https://hdl.handle.net/20.500.14352/59101
T2  - Journal of Applied Physics
AB  - The bonding configuration, hydrogen evolution, and defect content of rapid thermally annealed (RTA) SiOx:H films of different compositions were studied. Infrared absorption measurements showed that all the hydrogen present in the films is lost at...
LA  - eng
M2  - 1906
PB  - American Institute of Physics
KW  - Electron-Paramagnetic-Resonance
KW  - Hydrogenated Amorphous-Silicon
KW  - Cyclotron-Resonance
KW  - Thin-Films
KW  - Temperature
KW  - Interface
KW  - Photoluminescence
KW  - Nanocrystals
KW  - Vibrations
KW  - Evolution.
TI  - Thermally induced modifications on bonding configuration and density of defects of plasma deposited SiOx : H films
TY  - journal article
VL  - 92
ER  -