TY  - JOUR
AU  - Martínez Antón, Juan Carlos
AU  - Alonso Fernández, José
AU  - Gómez Pedrero, José Antonio
PY  - 2015
DO  - 10.1364/OE.23.009494
SN  - 1094-4087
UR  - https://hdl.handle.net/20.500.14352/24645
T2  - Optics express
AB  - Optical profilometers based on light reflection may fail at surfaces presenting steep slopes and highly curved features. Missed light, interference and diffraction at steps, peaks and valleys are some of the reasons. Consequently, blind areas or...
LA  - eng
M2  - 9494
PB  - The Optical Society Of America
KW  - Instrumentation
KW  - Measurement
KW  - Metrology
KW  - Optical inspection
KW  - Surface measurements
KW  - Micro-optical devices
KW  - Optical profilometry
TI  - Topographic optical profilometry of steep slope micro-optical transparent surfaces
TY  - journal article
VL  - 23
ER  -