RT Journal Article T1 Study of pinholes and nanotubes in AlInGaN films by cathodoluminescence and atomic force microscopy A1 Herrera, M. A1 Cremades Rodríguez, Ana Isabel A1 Piqueras De Noriega, Francisco Javier A1 Stutzmann, M. A1 Ambacher, O. AB Cathodoluminescence (CL) in the scanning electron microscope and atomic force microscopy (AFM) have been used to study the formation of pinholes in tensile and compressively strained AlInGaN films grown on Al2O3 substrates by plasma-induced molecular beam epitaxy. Nanotubes, pits, and V-shaped pinholes are observed in a tensile strained sample. CL images show an enhanced emission around the pits and a lower intensity at the V-shaped pinholes. Rounded pinholes appear in compressively strained samples in island-like regions with higher In concentration. The grain structure near the pinholes is resolved by AFM. (C) 2004 American Institute of Physics. PB American Institute of Physics SN 0021-8979 YR 2004 FD 2004-11 LK https://hdl.handle.net/20.500.14352/50848 UL https://hdl.handle.net/20.500.14352/50848 LA eng NO © 2004 American Institute of Physics.This work has been partially support by the MCYT(Project No. MAT-2000-2119). M. H. thanks CONACYT for a postdoctoral grant. The help of Dr. Hidalgo in the experimental measurements is acknowledged. NO MCYT NO CONACYT DS Docta Complutense RD 7 abr 2025