RT Journal Article
T1 In-situ scanning electron microscopy and atomic force microscopy Young's modulus determination of indium oxide microrods for micromechanical resonator applications
A1 Bartolomé Vílchez, Javier
A1 Hidalgo Alcalde, Pedro
A1 Maestre Varea, David
A1 Cremades Rodríguez, Ana Isabel
A1 Piqueras De Noriega, Francisco Javier
AB Electric field induced mechanical resonances of In2O3 microrods are studied by in-situ measurements in the chamber of a scanning electron microscope. Young's moduli of rods with different cross-sectional shapes are calculated from the resonance frequency, and a range of values between 131 and 152GPa are obtained. A quality factor of 1180-3780 is measured from the amplitude-frequency curves, revealing the suitability of In2O3 microrods as micromechanical resonators. The Young's modulus, E, of one of the rods is also measured from the elastic response in the force-displacement curve recorded in an atomic force microscope. E values obtained by in-situ scanning electron microscopy and by atomic force microscopy are found to differ in about 8%. The results provide data on Young's modulus of In2O3 and confirm the suitability of in-situ scanning electron microscopy mechanical resonance measurements to investigate the elastic behavior of semiconductor microrods.
PB American Institute of Physics
SN 0003-6951
YR 2014
FD 2014-04-21
LK https://hdl.handle.net/20.500.14352/33678
UL https://hdl.handle.net/20.500.14352/33678
LA eng
NO © 2014 AIP Publishing LLC.This work has been supported by MINECO (Project Nos. MAT 2012-31959 and CSD 2009-00013). J.B. acknowledges the financial support from Universidad Complutense de Madrid.
NO MINECO
NO Universidad Complutense de Madrid
DS Docta Complutense
RD 17 abr 2025