RT Journal Article
T1 Electrical characterization of gadolinium oxide deposited by high pressure sputtering with in situ plasma oxidation
A1 Pampillón, María Ángela
A1 Feijoo, Pedro Carlos
A1 San Andrés Serrano, Enrique
AB In this work, we characterized gadolinium oxide films deposited on silicon by high pressure sputtering with a two-step process: first, we sputtered metallic gadolinium in an argon atmosphere and then, we performed an in situ plasma oxidation of the metallic layer previously deposited. By means of high resolution transmission electron microscopy, we can detect the oxidation degree of the metallic film. Under optimized deposition conditions, fully oxidized Gd2O3 films are obtained. In addition, the capacitance and conductance as a function of gate voltage of Pt gated metal–insulator–semiconductor capacitors confirm stable dielectric behavior of the fully oxidized films. The devices show low gate leakage currents (∼10−5 A/cm2 at 1 V for 2.2 nm of equivalent oxide thickness), low interface trap density and an almost negligible hysteresis and frequency dispersion.
PB Elsevier
SN 0167-9317
YR 2013
FD 2013-03-25
LK https://hdl.handle.net/20.500.14352/98120.2
UL https://hdl.handle.net/20.500.14352/98120.2
LA eng
NO Está depositada la versión preprint del artículo
NO Ministerio de Economía y Competitividad (España)
DS Docta Complutense
RD 5 abr 2025