%0 Journal Article %A Villafranca Velasco, Aitor %A Calvo Padilla, María Luisa %A Cheben, Pavel %A Ortega Moñux, Alejandro %A Alonso Ramos, Carlos Alberto %A Molina fernández, Íñigo %A Lapointe, Jean %A Vachon, Martin %A Janz, Siegfried %A Xu, Dan-Xia %T Ultracompact polarization converter with a dual subwavelength trench built in a silicon-on-insulator waveguide %D 2012 %@ 0146-9592 %U https://hdl.handle.net/20.500.14352/44172 %X The design and fabrication of an ultracompact silicon-on-insulator polarization converter is reported. The polarization conversion with an extinction ratio of 16 dB is achieved for a conversion length of only 10 mu m. Polarization rotation is achieved by inducing a vertical asymmetry by forming in the waveguide core two subwavelength trenches of different depths. By taking advantage of the calibrated reactive ion etch lag, the two depths are implemented using a single mask and etching process. The measured converter loss is -0.7 dB and the 3 dB bandwidth is 26 nm. %~