RT Journal Article T1 Ultracompact polarization converter with a dual subwavelength trench built in a silicon-on-insulator waveguide A1 Villafranca Velasco, Aitor A1 Calvo Padilla, María Luisa A1 Cheben, Pavel A1 Ortega Moñux, Alejandro A1 Alonso Ramos, Carlos Alberto A1 Molina fernández, Íñigo A1 Lapointe, Jean A1 Vachon, Martin A1 Janz, Siegfried A1 Xu, Dan-Xia AB The design and fabrication of an ultracompact silicon-on-insulator polarization converter is reported. The polarization conversion with an extinction ratio of 16 dB is achieved for a conversion length of only 10 mu m. Polarization rotation is achieved by inducing a vertical asymmetry by forming in the waveguide core two subwavelength trenches of different depths. By taking advantage of the calibrated reactive ion etch lag, the two depths are implemented using a single mask and etching process. The measured converter loss is -0.7 dB and the 3 dB bandwidth is 26 nm. PB The Optical Society Of America SN 0146-9592 YR 2012 FD 2012-02-01 LK https://hdl.handle.net/20.500.14352/44172 UL https://hdl.handle.net/20.500.14352/44172 LA eng NO © 2012 Optical Society of America.Financial support from the Spanish Ministry of Science and Innovation (MICINN) is acknowledged under grants TEC2008-04105 and TEC2009-10152. NO Ministerio de Ciencia e Innovación (MICINN), España DS Docta Complutense RD 15 abr 2025