TY  - JOUR
AU  - Martil De La Plaza, Ignacio
AU  - González Díaz, Germán
PY  - 1999
DO  - 10.1016/S0040-6090(98)01669-1
SN  - 0040-6090
UR  - https://hdl.handle.net/20.500.14352/59280
T2  - Thin Solid Films
AB  - We have analyzed the influence of rapid thermal annealing (from 300 to 1050 degrees C) on the optical properties of a-SiN(x):H. Three compositions were investigated: x = 0.97, x = 1.43 and x = 1.55. Two different behaviors are observed depending on...
LA  - eng
M2  - 433
PB  - Elsevier Science SA
KW  - Chemical-Vapor-Deposition
KW  - Dielectrics.
TI  - Optical absorption in amorphous hydrogenated silicon nitride thin films deposited by the electron cyclotron resonance plasma method and subjected to rapid thermal annealing
TY  - journal article
VL  - 343
ER  -