RT Journal Article T1 Inhomogeneous incorporation of In and Al in molecular beam epitaxial AlInGaN films A1 Cremades Rodríguez, Ana Isabel A1 Narayanan, V.C. A1 Piqueras De Noriega, Francisco Javier A1 Lima, A.P. A1 Ambacher, O. A1 Stutzmann, M. AB Plasma-induced molecular beam epitaxial AlInGaN heterostructures have been characterized by spatial resolved cathodoluminescence and x-ray energy dispersive microanalysis. Competitive incorporation of Al and In has been observed, with the formation of In-rich regions, showing enhanced luminescence around surface pinholes. These island-like In-rich regions are favored by growth at lower temperature due to the higher incorporation of indium into the alloy. The elastic strain relaxation associated to pinhole formation induces preferential local indium incorporation. The diffusion of carriers to these areas with reduced band gap enhances the luminescence emission of the quaternary film. The width and intensity of the luminescence appear to be sensitive to the mismatch between the quaternary film and the GaN layer below. PB American Institute of Physics SN 0021-8979 YR 2001 FD 2001-11-01 LK https://hdl.handle.net/20.500.14352/58811 UL https://hdl.handle.net/20.500.14352/58811 LA eng NO © 2001 American Institute of Physics.This work was partially supported by the Ministerio de Ciencia y Tecnologıía (Project No. Mat-2000-2119). The help of F. Sanz is acknowledged. NO Ministerio de Ciencia y Tecnología DS Docta Complutense RD 9 abr 2025