TY - JOUR AU - Caudevilla Gutiérrez, Daniel AU - Algaidy, Sari AU - Pérez Zenteno, Francisco José AU - Duarte Cano, Sebastián AU - García Hernansanz, Rodrigo AU - Olea Ariza, Javier AU - San Andrés Serrano, Enrique AU - Prado Millán, Álvaro Del AU - Barrio, R. AU - Torres, I. AU - García Hemme, Eric AU - Pastor, D. PY - 2022 DO - 10.1088/1361-6641/ac9a67 SN - 0268-1242 UR - https://hdl.handle.net/20.500.14352/72845 T2 - Semiconductor Science and Technology AB - In this work we have successfully hyperdoped germanium with tellurium with a concentration peak of 10(21) cm(-3). The resulting hyperdoped layers show good crystallinity and sub-bandgap absorption at room temperature which makes the material a good... LA - eng PB - Iop Publishing Ltd KW - Implantation KW - Silicon TI - Electrical transport properties in Ge hyperdoped with Te TY - journal article VL - 37 ER -