TY  - JOUR
AU  - Benítez Fernández, Rafael
AU  - Gomez-Munoz, Gonzalo
AU  - García Hemme, Eric
AU  - Roca Giménez, Nuria
AU  - Cabello, Fátima
AU  - García Pardo, Marina
AU  - Gonzalo, Jose
AU  - Solis, Javier
AU  - Prado Millán, Álvaro Del
AU  - GarciaLechuga, Mario
AU  - Olea Ariza, Javier
AU  - Siegel, Jan
AU  - Pastor Pastor, David
PY  - 2026
DO  - 10.1016/j.apsusc.2026.166323
SN  - 0169-4332
UR  - https://hdl.handle.net/20.500.14352/134039
T2  - Applied Surface Science
AB  - In this work, we describe a methodology to highly improve the quality of micro-structured silicon obtained by femtosecond-laser irradiation in ambient air atmosphere. Optimum femtosecond laser irradiation conditions have been selected to obtain a high...
LA  - eng
M2  - 166323-1
PB  - Elsevier
KW  - Femtosecond laser irradiation
KW  - High aspect-ratio micro-structured silicon
KW  - Rapid thermal annealing
KW  - Silicon oxide removal
KW  - High photon absorption
TI  - High-quality fs-laser structured Si in air for optoelectronic applications
TY  - journal article
VL  - 730
ER  -