TY - JOUR AU - Wirths, S. AU - Pampillón Arce, María Ángela AU - San Andrés Serrano, Enrique AU - Starge, D. AU - Tiedemann, A.T. AU - Mussler, G. AU - Fox, A. AU - Breuer, U. AU - Hartmann, J-M. AU - Mantl, S. AU - Buca, D. PY - 2014 DO - 10.1109/istdm.2014.6874645 UR - https://hdl.handle.net/20.500.14352/34882 T2 - 2014 7th International Silicon-Germanium Technology and device meetinTING (ISTDM) AB - Highly tensile strained Ge(Sn) layers epitaxially grown on GeSn strain relaxed buffer layer have been presented. Electrical characterization exhibits good interfacial quality of the high-k gate stacks employing HfO2 on Ge and strained Ge. These... LA - eng M2 - 13 PB - IEEE TI - Growth and interface engineering of highly strained low bandgap group IV semiconductors TY - journal article ER -