TY  - JOUR
AU  - Olea Ariza, Javier
AU  - González Díaz, Germán
AU  - Pastor Pastor, David
AU  - García Hemme, Eric
AU  - Caudevilla Gutiérrez, Daniel
AU  - Algaidy, Sari
AU  - Pérez Zenteno, Francisco José
AU  - Duarte Cano, Sebastián
AU  - García Hernansanz, Rodrigo
AU  - Prado Millán, Álvaro Del
AU  - San Andrés Serrano, Enrique
AU  - Martil De La Plaza, Ignacio
AU  - Lee, Yao-Jen
AU  - Hong, Tzu-Chieh
AU  - Chao, Tien-Sheng
PY  - 2023
DO  - 10.1088/1361-6641/acac4a
SN  - 0268-1242
UR  - https://hdl.handle.net/20.500.14352/88805
T2  - Semiconductor Science and Technology
AB  - Microwave annealing (MWA) processes were used for the first time to obtain Ti supersaturated Si. High Ti doses were ion implanted on Si substrates and subsequently MWA processed to recrystallize the amorphous layer. The resulting layers were...
LA  - eng
PB  - IOP Publishing
KW  - Supersaturated
KW  - Microwave
KW  - Silicon
KW  - Titanium
KW  - Infrared
KW  - Microelectronics
KW  - Implantation
TI  - Ti supersaturated Si by microwave annealing processes
TY  - journal article
VL  - 38
ER  -