TY  - JOUR
AU  - Muñoz Piña, S.
AU  - Alcaide, A.M.
AU  - Limones Ahijón, B.
AU  - Oliva Ramírez, M.
AU  - Rico, V.
AU  - Alcalá Penadés, Germán
AU  - González, M.U.
AU  - García Martín, J.M.
AU  - Álvarez, R.
AU  - Wang, D.
AU  - Schaaf, P.
AU  - González Elipe, A.R.
AU  - Palmero, A.
PY  - 2022
DO  - 10.1016/j.surfcoat.2022.128293
UR  - https://hdl.handle.net/20.500.14352/126494
T2  - Surface and Coatings Technology
AB  - It is demonstrated that, besides classical nanocolumnar arrays, the oblique angle geometry induces the growth of singular structures in the nanoscale when using wisely designed patterned substrates. Well-ordered array of crosses, cylindrical nanorods...
LA  - eng
M2  - 128293
PB  - ELSEVIER SCIENCE SA
KW  - Magnetron sputtering
KW  - Nanostructured thin films
KW  - Substrate patterning
KW  - Oblique angle deposition
KW  - Porous thin films
TI  - Thin film nanostructuring at oblique angles by substrate patterning
TY  - journal article
VL  - 436
ER  -