%0 Journal Article
%A Peres, Marco
%A Fernandes, A.J.S.
%A Oliveira, F.J.
%A Alves, L.C.
%A Alves, E.
%A Monteiro, T.S.
%A Cardoso, S.
%A Alonso Orts, Manuel
%A Nogales Díaz, Emilio
%A Méndez Martín, María Bianchi
%T Micro-opto-electro-mechanical device based on flexible beta-Ga_2O_3 micro-lamellas
%D 2019
%@ 2162-8769
%U https://hdl.handle.net/20.500.14352/13597
%X A thermal actuator based on thin flexible lamellas of Ga_2O_3 was designed in order to demonstrate the potential of this semiconductor for micro-opto-electro-mechanical applications (MOEMs). The working principle of these devices is based on the thermal expansion that induces a vertical movement resultant of the lamella elongation due the self-heating/Joule effect. Upon excitation with photons, electrons or ions, intrinsic luminescence bands associated with self-trapped excitons and donor-acceptor pair recombination dominate the emission spectrum. When a current passes through the device, simultaneously with the thermal expansion, this luminescence is strongly quenched. Based on systematic Photoluminescence and Raman studies as a function of temperature and as a function of the applied power it is demonstrated that the observed luminescence quenching is directly related with the Joule heating effect. This work presents for the first time a thermal actuator based on Ga_2O_3  and it intends to be a stimulus for future works on MOEMs applications based on this semiconductor.
%~