RT Journal Article
T1 Micro-opto-electro-mechanical device based on flexible beta-Ga_2O_3 micro-lamellas
A1 Peres, Marco
A1 Fernandes, A.J.S.
A1 Oliveira, F.J.
A1 Alves, L.C.
A1 Alves, E.
A1 Monteiro, T.S.
A1 Cardoso, S.
A1 Alonso Orts, Manuel
A1 Nogales Díaz, Emilio
A1 Méndez Martín, María Bianchi
AB A thermal actuator based on thin flexible lamellas of Ga_2O_3 was designed in order to demonstrate the potential of this semiconductor for micro-opto-electro-mechanical applications (MOEMs). The working principle of these devices is based on the thermal expansion that induces a vertical movement resultant of the lamella elongation due the self-heating/Joule effect. Upon excitation with photons, electrons or ions, intrinsic luminescence bands associated with self-trapped excitons and donor-acceptor pair recombination dominate the emission spectrum. When a current passes through the device, simultaneously with the thermal expansion, this luminescence is strongly quenched. Based on systematic Photoluminescence and Raman studies as a function of temperature and as a function of the applied power it is demonstrated that the observed luminescence quenching is directly related with the Joule heating effect. This work presents for the first time a thermal actuator based on Ga_2O_3  and it intends to be a stimulus for future works on MOEMs applications based on this semiconductor.
PB Electrochemical Society
SN 2162-8769
YR 2019
FD 2019-06-24
LK https://hdl.handle.net/20.500.14352/13597
UL https://hdl.handle.net/20.500.14352/13597
LA eng
NO © The Authors 2019. Published by ECS.Artículo firmado por más de diez autores.This work was supported by the Portuguese Foundation for Science and Technology (FCT), under the projects UID/FIS/50010/2019 and PTDC/CTM-CTM/28011/2017, LISBOA-01-0145-FEDER-028011.
NO Portuguese Foundation for Science and Technology (FCT)
DS Docta Complutense
RD 11 abr 2025