TY - JOUR AU - Peres, Marco AU - Fernandes, A.J.S. AU - Oliveira, F.J. AU - Alves, L.C. AU - Alves, E. AU - Monteiro, T.S. AU - Cardoso, S. AU - Alonso Orts, Manuel AU - Nogales Díaz, Emilio AU - Méndez Martín, María Bianchi PY - 2019 DO - 10.1149/2.0441907jss SN - 2162-8769 UR - https://hdl.handle.net/20.500.14352/13597 T2 - ECS journal of solid state science and technology AB - A thermal actuator based on thin flexible lamellas of Ga_2O_3 was designed in order to demonstrate the potential of this semiconductor for micro-opto-electro-mechanical applications (MOEMs). The working principle of these devices is based on the... LA - eng M2 - 3235 PB - Electrochemical Society KW - Single-crystals KW - Optical-absorption KW - Luminescence KW - Field TI - Micro-opto-electro-mechanical device based on flexible beta-Ga_2O_3 micro-lamellas TY - journal article VL - 8 ER -