RT Conference Proceedings
T1 High Pressure Sputtering of Mo targets in mixed Ar/O2/H2 atmospheres for hole selective contacts in photovoltaic cells
A1 Pérez Zenteno, Francisco José
A1 San Andrés Serrano, Enrique
A1 García Hemme, Eric
A1 Torres, Ignacio
A1 Barrio, Rocío
A1 Caudevilla Gutiérrez, Daniel
A1 Duarte Cano, Sebastián
A1 García Hernansanz, Rodrigo
A1 Olea Ariza, Javier
A1 Pastor Pastor, David
A1 Prado Millán, Álvaro Del
AB We have deposited thin films of MoO x using high-pressure sputtering (HPS) and Ar/O 2 /H 2 atmospheres aiming at the compositional and interface control. We found that H2 impacts plasma composition, which in turn produces a reduction of the oxygen content and a change in the refractive index of the films. However, the presence of hydrogen in the plasma atmosphere enhances interfacial SiO x regrowth, as FTIR shows. TEM measurements show that this regrowth is not critical for thin films. Also, increasing the hydrogen ratio produces a change from amorphous to an amorphous/polycrystalline mixture. Lifetime measurements show that these films are adequate for their integration into test HIT -like structures, but require more work to produce competitive iVoc values.
SN 2643-1300
YR 2023
FD 2023
LK https://hdl.handle.net/20.500.14352/91314
UL https://hdl.handle.net/20.500.14352/91314
LA eng
NO F. J. P. Zenteno et al., "High Pressure Sputtering of Mo Targets in Mixed Ar/O2/H2 Atmospheres for Hole Selective Contacts in Photovoltaic Cells," 2023 14th Spanish Conference on Electron Devices (CDE), Valencia, Spain, 2023, pp. 1-4, doi: 10.1109/CDE58627.2023.1033946
NO Se deposita la versión postprint de la ponencia
DS Docta Complutense
RD 7 abr 2025