TY  - CPAPER
AU  - Pérez Zenteno, Francisco José
AU  - San Andrés Serrano, Enrique
AU  - García Hemme, Eric
AU  - Torres, Ignacio
AU  - Barrio, Rocío
AU  - Caudevilla Gutiérrez, Daniel
AU  - Duarte Cano, Sebastián
AU  - García Hernansanz, Rodrigo
AU  - Olea Ariza, Javier
AU  - Pastor Pastor, David
AU  - Prado Millán, Álvaro Del
PY  - 2023
DO  - 10.1109/CDE58627.2023.10339461
SN  - 2643-1300
UR  - https://hdl.handle.net/20.500.14352/91314
AB  - We have deposited thin films of MoO x using high-pressure sputtering (HPS) and Ar/O 2 /H 2 atmospheres aiming at the compositional and interface control. We found that H2 impacts plasma composition, which in turn produces a reduction of the oxygen...
LA  - eng
TI  - High Pressure Sputtering of Mo targets in mixed Ar/O2/H2 atmospheres for hole selective contacts in photovoltaic cells
TY  - conference paper
ER  -