TY  - JOUR
AU  - Schmidt, Rainer
AU  - Mayrhofer, Patrick
AU  - Schmid, Ulrich
AU  - Bittner, Achim
PY  - 2019
DO  - 10.1063/1.5050181
SN  - 0021-8979
UR  - https://hdl.handle.net/20.500.14352/13248
T2  - Journal of applied physics
AB  - In this work, a comprehensive characterization of metal-insulator-semiconductor structures by impedance spectroscopy is demonstrated for the case of electrically insulating, highly c-axis oriented, 600 nm sputter-deposited AlN films on n-Si substrates...
LA  - eng
PB  - American Institute of Physics
KW  - Field-effect transistors
KW  - Aln
KW  - Temperature
KW  - Resonators
KW  - Resistance
KW  - Interface
KW  - Thickness
TI  - Impedance spectroscopy of Al/AlN/n-Si metal-insulator-semiconductor (MIS) structures
TY  - journal article
VL  - 125
ER  -