TY  - JOUR
AU  - Martil De La Plaza, Ignacio
AU  - González Díaz, Germán
AU  - Prado Millán, Álvaro Del
AU  - San Andrés Serrano, Enrique
PY  - 2004
DO  - 10.1016/j.nimb.2003.11.003
SN  - 0168-583X
UR  - https://hdl.handle.net/20.500.14352/51121
T2  - Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
AB  - The composition of silicon oxynitride (SiOxNy:H) films deposited by electron cyclotron resonance chemical vapour deposition (ECR-CVD) was analysed by ion beam techniques, heavy-ion elastic recoil detection analysis (HI-ERDA) with 150 MeV Kr-86 ions...
LA  - eng
M2  - 237
PB  - Elsevier
KW  - Electron-Cyclotron-Resonance
KW  - Silicon Oxynitride Films
KW  - Chemical-Vapor-Deposition.
TI  - Compositional analysis of thin SiOxNy : H films by heavy-ion ERDA, standard RBS, EDX and AES: a comparison
TY  - journal article
VL  - 217
ER  -