TY  - JOUR
AU  - Pampillón, María Ángela.
AU  - Feijoo, Pedro Carlos
AU  - San Andrés Serrano, Enrique
AU  - Toledano-Luque, María
AU  - Prado Millán, Álvaro Del
AU  - Blázquez, Antonio J.
AU  - Lucía Mulas, María Luisa
PY  - 2011
DO  - 10.1016/j.mee.2011.03.025
SN  - 0167-9317
UR  - https://hdl.handle.net/20.500.14352/99177
T2  - Microelectronica engineering
AB  - Amorphous Gd2O3 and Sc2O3 thin films were deposited on Si by high-pressure sputtering (HPS). In order to reduce the uncontrolled interfacial SiOx growth, firstly a metallic film of Gd or Sc was sputtered in pure Ar plasma. Subsequently, they were in...
LA  - eng
M2  - 1357
PB  - Elsevier
KW  - High-k
KW  - Gadolinium oxide
KW  - Scandium oxide
KW  - Scavenging
TI  - Towards metal electrode interface scavenging of rare-earth scandates: A Sc2O3 and Gd2O3 study
TY  - journal article
VL  - 88
ER  -