TY - JOUR AU - Algaidy, Sari AU - Caudevilla Gutiérrez, David AU - Pérez Zenteno, Francisco José AU - García Hernansanz, Rodrigo AU - García Hemme, Eric AU - Olea Ariza, Javier AU - San Andrés Serrano, Enrique AU - Duarte Cano, Sebastián AU - Siegel, J. AU - Gonzalo, J. AU - Pastor Pastor, David AU - Prado Millán, Álvaro Del PY - 2023 DO - 10.1016/j.mssp.2022.107191 SN - 1369-8001 UR - https://hdl.handle.net/20.500.14352/72593 T2 - Materials Science in Semiconductor Processing AB - We present a detailed investigation on the formation of supersaturated GaAs using Ti+ implantation followed by nanosecond Pulsed Laser Melting (PLM). We have synthesized high-crystal quality supersaturated GaAs layers with concentrations of Ti above... LA - eng M2 - 107191 PB - Elsevier Science Ltd KW - Gallium compounds KW - Ion implantation KW - Pulsed laser melting KW - Supersaturated material KW - Titanium TI - High-quality single-crystalline epitaxial regrowth on pulsed laser melting of Ti implanted GaAs TY - journal article VL - 153 ER -