TY  - JOUR
AU  - Martil De La Plaza, Ignacio
AU  - González Díaz, Germán
AU  - San Andrés Serrano, Enrique
PY  - 2006
DO  - 10.1016/j.tsf.2005.12.239
SN  - 0040-6090
UR  - https://hdl.handle.net/20.500.14352/51111
T2  - Thin Solid Films
AB  - The composition of polycrystalline hafnium oxide thin films has been measured by heavy-ion elastic recoil detection analysis (HI-ERDA). The films were deposited by high-pressure reactive sputtering (HPRS) on silicon wafers using an oxygen plasma at...
LA  - eng
M2  - 695
PB  - Elsevier Science SA
KW  - Electron-Cyclotron-Resonance
KW  - Sioxnyhz Films
KW  - Silicon
KW  - Dielectrics.
TI  - Compositional analysis of polycrystalline hafnium oxide thin films by heavy-ion elastic recoil detection analysis
TY  - journal article
VL  - 515
ER  -