RT Journal Article T1 Preferential Growth of ZnO Micro- and Nanostructure Assemblies on Fs-Laser-Induced Periodic Structures A1 Sotillo Buzarra, Belén A1 Ariza García, Rocío A1 Siegel, Jan A1 Solis, Javier A1 Fernández Sánchez, Paloma AB In this work, we demonstrate the use of laser-induced periodic surface structures (LIPSS) as templates for the selective growth of ordered micro- and nanostructures of ZnO. Different types of LIPSS were first produced in Si-(100) substrates including ablative low-frequency spatial (LSF) LIPSS, amorphous-crystalline (a–c) LIPSS, and black silicon structures. These laser-structured substrates were subsequently used for depositing ZnO using the vapor–solid (VS) method in order to analyze the formation of organized ZnO structures. We used scanning electron microscopy and micro-Raman spectroscopy to assess the morphological and structural characteristics of the ZnO micro/nano-assemblies obtained and to identify the characteristics of the laser-structured substrates inducing the preferential deposition of ZnO. The formation of aligned assemblies of micro- and nanocrystals of ZnO was successfully achieved on LSF-LIPSS and a–c LIPSS. These results point toward a feasible route for generating well aligned assemblies of semiconductor micro- and nanostructures of good quality by the VS method on substrates, where the effect of lattice mismatch is reduced by laser-induced local disorder and likely by a small increase of surface roughness. PB MDPI SN 2079-4991 YR 2020 FD 2020-04-11 LK https://hdl.handle.net/20.500.14352/8098 UL https://hdl.handle.net/20.500.14352/8098 LA eng NO Ministerio de Economía y Competitividad (MINECO)/FEDER NO Comunidad de Madrid NO European Social Fund (ESF)/Youth Employment Initiative (YEI) DS Docta Complutense RD 14 may 2025